3XB Series 3-axis scan heads are used for optical scanning in X/Y and X/Y/Z applications where spot sizes as small as 5µm or scan fields as large as 2m x 2m are desired. The 3XB includes an X/Y scan head – plus a linear lens translator (the Z-axis) that produces a flat field by dynamically correcting focus across the scan field. Variable field and spot size adjustment offers application flexibility – ideal for process development and job shop settings. Nutfield WaveRunner software and control hardware enable the system designer to integrate and optimize a complete 3-axis scanning subsystem.
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